Spectroscopic Ellipsometer (SE)
Spectroscopic Reflectometer (SR)
Four Point Probe Measurement
All-in-one system
1.Wavelength Range: 193 nm to 1700 nm
2.High-Precision Measurement of Film Thickness and Refractive Index
(Reflectance measurement available as an option)
3.Ellipsometric Parameter Accuracy:
Tan(ψ) ≤ ±0.01; Cos(Δ) ≤ ±0.01
Fast Measurement: Less than 2 seconds
4.Fully Automated Measurement (Recipe Driven)
5.Direct Measurement on Transparent Substrates
No need for backside roughening or black coating
(e.g., ITO on Glass, SiN on Glass, etc.)
6.Optical Constant Measurement and Spectral Analysis for a wide range of functional materials