Multi-Site Parallel Wafer-Level Probing System

The Qualitau Muliti-Dite Probe system is not just a probe card, but a complete probing solution testing 10s to 100s of DUTs simultaneously. It includes the probe station, anti-vibration table, light tight enclosure, digital camera with high powered optics, optional vacuum hot chuck, multiple-pin mini-probe cards, and Qualitau's patented technique of placing multiple probe cards across the surface of a wafer. This technique probides the positioners with multi-dimensional alignmnet control including global X,Y,Z and theta adjustment on the chuck, X and Y adjustments on the rails, and X,Y,Z and Theta fine adjustments on each positioner head.