| ウエハーfab LCD製品 |
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E-Gun Deposition/Sputter/ICP-RIE/PECVD |
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Bonder |
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Plasma Stripper |
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Electroforming system(Mems Mold Insert)
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Mask Aligner
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Spin coater/Developer/Wet Bench |
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Projection Scanner |
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Plasma Stripper
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E-Beam Lithography System
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Excimer Laser Ablation
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UV Projection Scanner
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Solid State Laser Scriber for Solar Cell
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Laser Direct Writer
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Spin Coater/Developer/Hot Plate
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測量ツール |
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Contact Angle |
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Surface Tension Analysis System |
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Atomic Force Microscope |
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Film Characterized System |
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Surface Profiler |
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Ellipsometer |
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Non-contact Optical 3D Profiler |
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3D- SEM |
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Nano scratch and indentation tester |
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Surface Inspection |
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Tribometer |
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