| Equipment, Process |
 |
E-Gun Deposition/Sputter/ICP-RIE/PECVD |
|
Bonder |
|
|
Plasma Stripper |
|
|
Electroforming system(Mems Mold Insert)
|
|
|
Mask Aligner
|
|
|
Spin coater/Developer/Wet Bench |
|
|
Projection Scanner |
|
|
E-Beam Lithography System
|
|
|
Excimer Laser Ablation
|
|
|
UV Projection Scanner
|
|
|
Solid State Laser Scriber for Solar Cell
|
|
Laser Direct Writer
|
|
|
Spin Coater/Developer/Hot Plate
|
|
|
|
|
|
|
|
|
|
|
|
|
|
| ”” |
Equipment, Inspection & Measurement |
|
Contact Angle |
|
|
Surface Tension Analysis System |
|
|
Atomic Force Microscope |
|
|
Film Characterized System |
|
|
Surface Profiler |
|
|
Ellipsometer |
|
|
Non-contact Optical 3D Profiler |
|
|
3D- SEM |
|
|
Nano scratch and indentation tester |
|
|
Surface Inspection |
|
|
Tribometer |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
